JAMP-9510F Field Emission Auger Microprobe

Description

It is a high specification Auger electron spectrometer with a hemispherical analyzer to provide high throughput analysis of the chemical bonding state at nano to micro areas, and a field emission electron gun also used for EPMA, because it can deliver a large, stable electric current The highly precise eucentric specimen stage makes it possible to perform the previously-impossible analysis of insulators. This in combination with the floating type ion gun offers the versatility to handle any specimen, such as metals and insulation materials, to obtain composition information to and chemical information.
A newly-developed spectrum imaging method enables to capture electron spectra for each pixel in the image. Spectra in the selected areas in the image and elemental distributions can be extracted after the acquisition of the data, like EDS mapping. The spectrum imaging method prevents missing any elements by acquiring data in a wide energy range, which is totally different from conventional Auger mapping, where, elements to be mapped should be specified in advance. The measuring energy range and energy resolution are selectable as well as usual wide spectrum acquisition. Spectrum imaging can be applied not only to elemental analysis but also to reflection electron energy loss spectroscopy (REELS) analysis.

Specifications
Electron illumination system
SEI resolution 3nm（at 25kV, 10pA）
Probe diameter for Auger analysis 8nm（at 25kV, 1nA）
Electron gun Schottky field emission gun
Accelerating voltage 0.5 to 30kV
Probe current 10-11 to 2×10-7A
Magnification x 25 to 500,000
Auger analysis system
Analyzer Electrostatic hemispherical analyzer (HSA)
Energy resolution（ΔE/E） 0.05 to 0.6%
Sensitivity 840,000 cps/7 ch or more
(at 10 kV 10 nA Cu-LMN, 0.6% resolution, 60tilt)