JXA-iSP100 Electron Probe Microanalyzer (EPMA)

Description

Specimen insertion and acquisition of an optical image of the specimen holder (Stage Navigation image) is executed with a single click.
The field for analysis can be selected from the Stage Navigation image.
In combination of the Auto Focus function of an optical microscope and Auto functions of SEM incorporating a new system with higher accuracy and faster degree of capabilities, any user can acquire high quality SEM images. “Live Analysis” enables elemental screening during observation. “Easy EPMA” is available, so novice users can smoothly operate the EPMA. “EPMA-XRF integration” allows for condition setting of EPMA based on the XRF data. Integration of WD/ED provides efficient analysis time. Operability is further enhanced with the integration of SEM, EDS, WDS and optical images.