PD10 Reticle / Mask Particle Detection System

Description

PD10 is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD10 is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD10 system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools.

Adjustable detection sensitivity by utilizing a combination of optical systems
OHT, EFEM, multi-port, multi-slot adaptation
Ability to reanalyse inspection data for faster inspection recipe optimization
Integration options with other HORIBA sensor products like Raman spectroscopy and Ellipsometry
False detection reduction function
Innovative software with improved usability