CS-1000 Chemical Solution Monitoring System

Description

Enables the concentration management of multi-component chemical solutions containing trace elements used in the BEOL process*1.
Low concentration components at ppm level*2 in chemical solutions can be detected without any pretreatment. Simply install the all-in-one system, consolidated in an independent cabinet, at the manufacturing site to begin use*3.

*1 Abbreviation for “back end of line,” referring to the wiring formation process in the semiconductor front-end process.
*2 ppm = parts per million. For liquid components, 1 ppm means that 1 mg of a component is present in 1 liter of liquid..
*3 SEMI S2 certified.

【Basic Specification】
Product name Chemical Solution Monitoring System
Model CS-1000
Measurement item Chemical Concentration, Conductivity, pH
Measurement principle Absorption spectroscopic method, 2-electrode method, Glass electrode
Target chemicals Multi-component chemical solutions used in semiconductor manufacturing processes (Please contact us for details)
Dimension 700 (W) × 610 (D) × 1640 (H) mm (Excluding protrusions)
Weight Approx. 200kg
Wetted materials Cabinet (PFA, PTFE)
Absorbance Monitor (PFA, PTFE, Quartz, Kalrez™)
Conducvitity Meter (PFA, Carbon, Kalrez™)
pH Meter – Drain use (PVC, PTFE, Glass, ETFE, PEEK, Olefinic resin, THV, PFA, Kalrez™, PharMed BPT)
※Karlez™ is trademarks of DuPont de Nemours, Inc.
Conforming standards CE , KC , FCC Rules Part15 , UKCA , SEMI S2
scrollable

【Condition of installation】
Ambient temperature 20 to 30 degree C (Within ± 0.5 degree/1hour, sudden temperature change should be avoided)
Ambient humidity 40 to 70%RH (Should be no dew condensation)
Power source AC 190～240V (Single-Phase）、50/60Hz
Power consumption Approx. 355VA (Transient electric current at the time of the start is excluded)
Communication Analog Output: Hardwired_4-20mA, Serial: RS-485_Modbus RTU, Parallel IO (refer to attachement)
※ Signal output is fixed at 1.5mA when measured values are not updated, such as monitor error.
scrollable